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MEMS方法制造小型PEM燃料电池电极

Electrode of Smart PEM Fuel Cell Fabricated by MEMS

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【作者】 张太平阎桂珍张大成阮勇陈正豪邢怡铭

【Author】 Zhang Taiping1 Yan Guizhen1 Zhang Dacheng1 Ruan Yong1 Philip C.H.Chan2 I-Ming Hsing31(Microelectronics Institute of Peking University, Beijing 100871, China)2(Department of Electrical and Electronics Engineering, Hong Kong University of Science and Technology,Hong Kong SAR, China)3(Department of Chemical Enginnering, Hong Kong University of Science and Technology, Hong Kong SAR, China)

【机构】 北京大学微电子所香港科技大学电气电子工程系香港科技大学化工系 北京100871北京100871香港香港

【摘要】 小型PEM燃料电池电极有着比较复杂的细微结构,电极担负了收集电荷,传输燃料,催化剂载体和构架支撑的功能。介绍了一种新的带有燃料传输孔的硅片电极制造方法,并且在它的表面上生长了一层多孔硅薄膜,以利于燃料传输,扩散和渗透。多孔硅孔径分布和深度范围从百纳米到几十纳米。当催化剂Pt溅射到它表面时,受多孔硅形状的限制,Pt就形成了不连续微小颗粒,对乙醇有比较强的催化作用。用此电极组装的电池,使用乙醇或甲醇燃料时分别有0 .5 5 V和0 .6 V的输出电压。

【Abstract】 The electrode of micro fuel cell is an important element.It describes a novel approach of fabrication of micro fuel cell electrode.The electrode has three function:collect current,catalyst loader;transport fuel. A new method to produce density holes and using plasma to etch poly-silicon becoming porous on the interface is developed. The ora side of the hole is 60×60 um2.The porous silicon (PS) is hundreds nm.The liquid fuel (methanol or alcohol) can be flowed into the interface among catalyst and PS and proton-conducting membrane without any bump and heater to drive.Platinum was sputtering as small grain on the porous surface.It has a stronger catalysis.The electrodes with this kind of structure are used in a micro fuel cell and are measured.

【关键词】 燃料电池多孔硅等离子
【Key words】 Fuel cell Porous silicon Plasma
【基金】 国家重大基础研究项目“973”(课题编号G1999033108)。
  • 【文献出处】 仪器仪表学报 ,Chinese Journal of Scientific Instrument , 编辑部邮箱 ,2004年S2期
  • 【分类号】TM911.4
  • 【被引频次】1
  • 【下载频次】161
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