【摘要】 用纳米晶钛酸钡粉末制成电阻式和电容式两种结构的湿敏元件。测量了两种结构元件在不同湿度(11%～98%)、不同频率(10Hz～100kHz)时的电阻、电容、阻抗等电学参数,对元件的灵敏度、阻抗、湿滞、响应—恢复时间等感湿特性进行了测量和分析。结果表明两种结构的湿敏元件都具有较高的灵敏度,但最佳测试频率不同。更多还原

【Abstract】 A resistive type and a capacitive type humidity sensors were made of nanocrystalline BaTiO₃.The resistance,capacitance and impedance were investigated when relative humidity（RH） varied from 11% to 98% and frequence shifted from 10Hz to 100kHz.The sensitivity,humidity hysteresis,response-recover properties and impedance properties of the two type humidity sensors were tested.The sensitivities of both kinds of sensors are high.The best measurement frequencies are different for two kinds of humidity sensors.更多还原