【摘要】 有许多测量微位移的光干涉方法 ,然而难以实现结构紧凑、价格低的测量系统 ,因为这些传统干涉方法都需要许多光学元器件。提出用激光自混合干涉术测量微位移 ,分析和讨论了自混合干涉信号的产生和处理方法 ,用快速傅立叶变换(FFT)相位探测技术分析自混合干涉信号 ,可提高相位测量精度。提出的传感器可以用于亚微米级位移的测量和控制 ,并给出了 PZT位移的实验结果更多还原

【Abstract】 There exist many conventional interferometry for the micro displacement measurement,in the methods,however,it is difficult to construct compact and inexpensive measurement systems,because many optical elements and devices were necessary.Self-mixing interferometry is proposed for the measurement and control of sub-micron displacement.Self-mixing interference principle and signal processing technique are discussed.FFT phase detection technique was applied to analyze SMI signal.By these techniques,the high precision measurement can be obtained.The experiment result of displacement measurement of bimorph PZT is given.更多还原