【摘要】 基于啄木鸟头部生物构造及其仿生隔振机理 ,采用混合隔振技术建立了微制造平台隔振系统。该系统以空气弹簧和橡胶层作为被动隔振元件、超磁致伸缩致动器作为主动隔振元件。针对 H2 最优控制和 H∞ 鲁棒控制的优缺点 ,主动控制器采用H2 / H∞ 混合控制进行设计 ,并通过 L MI凸优化方法求解 H2 / H∞ 混合控制器。仿真结果表明所设计的 H2 / H∞ 混合控制器具有良好的鲁棒稳定性和时域性能 ,可在非常宽的频率范围对基础干扰和由微制造设备产生的直接干扰所引起的微制造平台振动进行有效的控制 ,其振动控制效果明显优于 H∞ 控制更多还原

【Abstract】 Based on the bionic isolation mechanism and organic texture of woodpecker’s brain,a hybrid vibration isolation system of micro-manufacturing platform is developed.This system uses air springs and rubber layer as passive vibration isolation elements and giant magnetostrictive actuators as active vibration isolation elements. Considering the merit and defect of the H 2 optimal control and H ∞ robust control, the active vibration control system is designed according to the mixed H 2/H ∞ optimal control theory,and the controller by LMI convex optimal solution is established. The simulation results show that the developed mixed H 2/H ∞ control system is robust stable and optimal in the sense of H 2 norm,and has good isolation performance against the floor disturbance and the direct disturbance produced by the micro-manufacturing equipment over wide frequency area.更多还原