【摘要】 应用加权中值滤波法对薄壁梁式挠性器件下摆量进行高准确度CCD检测。薄壁梁式挠性器件在测量过程中测量图像存在高频抖动现象,因此测量准确度不高,运用加权中值滤波后使用最小二乘法细分技术,可以在实现提高测量准确度的同时,消除高频抖动带来的误差,从而可以有效提高CCD测量薄壁梁式挠性器件下摆量的准确度。实验表明,该方法比传统测量方法准确度提高20倍以上。更多还原

【Abstract】 Weighted median filter technique is applied to measure the droop of Vibrating Beam Component (VBC) using CCD with accuracy. High-frequency vibration exists in the image of VBC CCD measurement, consequently, the measurement accuracy is not high. The technique using weighted median filter and least square sub-pixel selection could improve the measurement accuracy and eliminate the error from high-frequency vibration. Experiments show that the accuracy could be improved 20 times than that of conventional measurement method.更多还原