【摘要】 从研究STM仪器对振动的敏感性出发,对基于隧道效应的纳米振动传感器的理论、技术及实现方法进行了初步的研究和探索,研制了具有压电陶瓷结构的传感器样机模型,并进行了振动检测试验。结果表明,基于隧道效应的测振传感器具有很高的灵敏度、良好的频率特性和与STM仪器一致的振动响应特性。更多还原

【Abstract】 Starting with the sensitivity to vibration of STM, the exploration and research on theory,techniques and realized methods of nano vibration sensor based on tunneling effect are performed. A sample model with piezoelectric ceramic has been developed,and some experiments are made in the vibration detecting. The experimental results show that vibration sensor based on tunneling effect has high sensitivity,good frequency characteristic and vibratory response characteristic consistent with STM.更多还原