【摘要】 应用Greenhouse法对RF平面螺旋微电感进行了计算机模拟,探明了微电感品质因数Q值在高频域内的变化规律,得出了微电感金属层厚度、线宽、线间距及线圈数与RF平面螺旋微电感Q值的对应关系。研究发现,RF平面螺旋微电感的Q值在高频域内随频率增加而呈现先升高后下降的趋势,Q值存在峰值;微电感Q值在某一频率范围内随微电感金属层厚度、线宽的增加而增大;随线间距的增加,微电感的低频性能下降而高频(>1GHz)性能升高;当微电感直径一定时,随线圈数的增加,Q值有下降的趋势。更多还原

【Abstract】 The results of a computer investigation by Greenhouse method into the RF monolithic spiral inductor performance are presented. A scalable physical model that can accurately predict the behavior of spiral micro-inductors has been used to evaluate the effect of variations in layout geometry upon monolithic inductor performance over a broad range of frequency. It is shown in this work that the quality factor of the spiral micro-inductors increase with the frequency firstly, when the frequency is enough high, the Q decreases. The variations in layout geometry have an effective effect upon monolithic inductor performance at the range of radio frequency.更多还原