【摘要】 压电陶瓷驱动器在电场作用下将产生迟滞和蠕变,从而降低其定位精度。采用电荷控制可以减小位移迟滞和蠕变,该文从电流源电荷反馈和电压源电荷反馈两个角度,总结国内外各种电荷控制方案,进而提出应该优先选用电流源驱动压电陶瓷,并根据应用场合不同选择相应电荷控制方法的结论。更多还原

【Abstract】 Piezoelectric actuator controlled by electric field shows serious hysteresis and creep phenomena, which severely degrades the positioning accuracy. Hysteresis and creep can be reduced greatly based on charge control. This paper reviewed the implementations of charge control and proposed that the method driven by current source should be selected preferentially and the corresponding methods of charge control are applied according to different situations from two aspects of charge feedback driven by current and charge feedback driven by voltage.更多还原