【摘要】 首先介绍了硅微加速度计机械部分的工作原理及电容检测方法,同时分析了整个电路系统框图,然后构建出硅微加速度计系统总体结构,并将机械部分和电路部分在S域进行统一整合。利用MATLAB软件控制工具研究了校正环节对系统稳定性和动态性能的影响情况。通过大量实验给出了优化参数组合下的开环频率特性和零位漂移特性。最后得出结论:通过对重要校正环节的参数进行正确的调整可以很好地改善系统工作性能,并能提高系统输出的稳定性。更多还原

【Abstract】 The wroking principle and capacitor detection method of micromachined accelerometer’s mechanism part was firstly introdeced,meanwhile,the entire electrocircuit system frame was analyzed.The whole control system structure of the sensor was presented,and the mechanism part and circuit part become a conformity in S region.By using MATLAB software’s control box,the influence of choosing parameters upon system stabilization performance and dynamic performance was researched.The open-loop frequency characteristics under a set of premium parameters were presented by experiments.Finally the conclusion was drawn that the system’s working performance can be better off and the system output stability can be improved through regulating the parameters in important carlibration module.更多还原