【摘要】 阐述了铁电薄膜热释电非致冷红外传感器的工作原理,对铁电薄膜材料的要求及sol gel铁电薄膜电性能。研究了BST铁电薄膜红外传感器的制备工艺与测试方法。研制出单元和8元、9元、10元线列铁电薄膜热释电非致冷红外传感器。更多还原

【Abstract】 Working principle for ferroelectric thin films uncooled pyroelectric infrared sensors and requirements of electric properties for ferroelectric thin film materials were expounded,BST ferroelectric thin films were fabricated by improved sol-gel technology.Fabrication processing and measured method for ferroelectric thin film uncooled infrared sensors were studied.Ferroelectric thin film single element uncooled pyroelectric infrared sensors and 8,9,10 element uncooled sensing liner arrays were developed.更多还原