【摘要】 用Voigt、Reuss和Hill模型计算了各向同性和具有理想纤维织构的氮化钛 (TiN)薄膜的弹性常数矩阵 ,计算表明 :材料的弹性矩阵强烈地依赖于材料的织构 .为了定量地分析织构对弹性常数的影响 ,用晶体取向分布函数 (ODF)法推导了弹性常数与织构系数的关系表达式 .然后用高斯分布函数作为取向分布函数模拟了弹性常数随织构的变化情况 .更多还原

【Abstract】 The elastic constants of TiN thin films with the isotropic and ideal fiber texture were calculated by the Voigt, Reuss and Hill models. The results show that the elastic constants are strongly dependent on their textures. In order to analyze the effect of the texture on the elastic constants quantitively, the relationship between the elastic constants and texture was derived by the orientation distribution function(ODF). Then, Gaussian distribution function was adopted as orientation distribution function to simulate the variety of the elastic constants with the texture.更多还原