【摘要】 介绍微机械制造工艺的特点及关键技术,阐述微机械制造工艺的新技术及其发展趋势。更多还原

【Abstract】 The text introduces the characterizes and the key technique of the craft in the micromechanical fabrication processes. The new technology and development of the micromechanical fabrication processes are set forth.更多还原