【摘要】 表面电机是通过对平台的无摩擦悬浮,实现高速高精度的目的,它是下一代制造业技术的核心。国外对它的研究已经开展了十多年,国内尚无正式的文献报道。本文介绍了表面电机的工作原理并对电磁力进行计算分析。根据力学方程建立了表面电机水平方向运动的模拟内环模型,并对模拟内环反馈控制进行了研究,提出了无加速度感应器的控制方法。仿真结果表明,该模型具有较高的动态性能和稳定性。更多还原

【Abstract】 Surface motor (SFM), also named planar motor, is a new type of motor, which utilizes electromagnetic force to achieve high precision motor without friction. This paper discusses principles of SFM, and establishes a mathematical model. The control method of PID with a two-order feedback is developed. With the feedback of the position and the acceleration, the performance is highly promoted. However, the feedback of direct acceleration has a few demerits, so the paper gives an alternative to solve the problems. The simulation and result of the comparison shows that the method is good at improving the performance.更多还原