【摘要】 介绍了一种超声波微电机的设计研制工作。这种基于压电柱弯曲振动模态的超声波微电机,其直径仅有1 mm细,长约5 mm,重量仅有36 mg。它是采用压电柱作为定子,在压电柱的表面均匀分割出四个电极,进行极化和施加驱动电压。详细介绍了极化方式的选择,电极间隔的优化设计以及对原型样机的性能测试。实验表明,该电机能承受350Vpp的驱动电压,获得1800 rpm的转速和4 μNm的堵转力炬。此外,这种电机具有明显的微型化优势,根据现有工艺还可使电机直径减小到0.5 mm左右。更多还原

【Abstract】 A tiny ultrasonic motor was constructed by using a cylindrical piezoelectric ceramic as stator. The fabricated tiny motor has a diameter of 1 mm, a length of 5 mm and a/weight of 36 mg. Four electrodes were deposited on the stator’s surface and evenly distributed along the circumferential direction. A polarization method was developed for the stator and the space between two adjacent electrodes was carefully designed. By using the bending mode vibration of the stator, the tiny motor shows a performance with 1800 rpm speed and 4 μNm stalled torque and can be bear higher drive voltage until 350 Vpp. With the same technique, fabrication of even smaller motor can be envisioned.更多还原