【摘要】 针对共焦测量中单点扫描速度慢、机构复杂、光能利用率低的问题,介绍了一种利用结构光和共焦显微术相结合来实现多光束测量的新方法.通过改装显微照明光路,投射一结构光到被测物体上,获得了物体的层析像与普通显微镜成像的叠加像.该叠加像经过解码算法,实现了非零频分量的层析成像,并利用互强度理论,对该层析显微镜的层析能力和解码算法从理论上给出了表达式.数值模拟表明,该系统与针孔阵列、微透镜阵列和孔径相关相比,不仅简便可行,而且提高了速度,光能利用率也得到了明显的改善.更多还原

【Abstract】 Focusing on the problem such as slow scanning speed,complex system design and low light efficiency,a simple method to obtaining optical sectioning in multiple-beam confocal measurement was proposed. By modifying the illumination of the microscope,a structured light was projected onto object and the sectioned image of the object was gained in the image plane but with the unwanted ordinary image superimposed. By processing these composite images taken at three spatial position of the grid,the optically sectioned images were extracted. The formula of the image formation was established via the mutual intensity theory to explain the sectioning ability and the decoding theory of this new sectioning microscope. Compared with the other measurement systems,such as pinhole array,microlens array and aperture correlation,the newly proposed methed exhibits its fine feasibility and higher measurement rate.更多还原