【摘要】 介绍了一种基于微加工技术的新方法———纳米岛光刻技术。利用该技术制造出几十纳米到微米尺度的岛结构,然后利用剥离、刻蚀等微加工技术,将该岛转化成纳米孔、纳米岛、纳米井等结构。该技术的特点是能够制造出具有各种密度的纳米结构(最高覆盖率可达50%以上),且开发成本低,工艺性能优越,是一种有效制造纳米岛结构的专业方法。更多还原

【Abstract】 A new way (nano island lithography) for making the nano structures, based on micro fabrication technologies, is introduced. The islands with nano or micro diameters are firstly fabricated with nano island lithography, and then nano holes, nano islands, nano wells can be made from the islands by using liftoff, RIE etching, or other fabrication methods. The strong point of this technique is a very efficient and economic special way to make the nano island structures with different high packing densities (highest above 50%).更多还原