【摘要】 通过厚胶光刻工艺在硅片上制备SU 8胶模板,利用该模板制备了高分子聚合物PDMS(Polydimethylsiloxane,聚二甲基硅氧烷)微流道和薄膜结构。通过对不同结构的两层PDMS的不可逆粘接得到一种简单的阀结构,在外加气源压力作用下薄膜产生变形实现对微流道的控制。实验测量了微阀的控制气源压力与被控制液体流量之间的关系,说明膜阀的开闭性能良好。根据弹性薄膜的变形理论,对影响微阀性能的参数进行了分析,并提出了几种可行的用于薄膜微阀控制的方法。更多还原

【Abstract】 The SU-8 mold is acquired using the thick resist photolithography, through which PDMS (Polydimethylsiloxane)films and the microchannel are fabricated. A final microvalve is gained through the irreversible adhesion of two layer PDMS microchannels. The applied pressure of gas is used to distort the film to control the flow in microchannel. The relationship of control pressure of gas vs. the flow rate of liquid is measured through the experiment and the result shows this constructer work well. According to the theory of film distortion, different factors influencing on the performance of microvalve are analyzed and several feasible methods are presented,which will be beneficial to improve the control of the microvalve.更多还原