节点文献
基于DSP图形发生器曝光算法的研究
Research on Exposure Algorism of Pattern Generator Based on DSP
【摘要】 新型图形发生器使用DSP控制曝光过程,因此要求DSP程序高效地控制电子束实现图形的高精度扫描。而以往的算法(包括Bresenham算法)无法满足电子束扫描的特殊性,因此提出一种DSP实现曝光的算法。分析了Bresenham算法的缺陷,同时对提出的新算法进行工作效率的理论分析和曝光数据的采集对比,结果证明该算法是一种能够保证精度和效率的算法。同时还探讨了斜矩形不分割的曝光算法。
【Abstract】 Since DSP is playing the key part in the pattern generator,its control program is very important to the efficiency and precision for the electron beam scanning.The previous algorisms,including Bresenham,are not good enough to be used in the exposure process.With the discussion of Bresenham’s defect,a new algorism is proposed based on the analysis of efficiency and the contrast between different algorisms.The result of the algorism is satisfied with the requirements of the precision and efficiency.Besides that,the algorism to exposure a rectangle with a rotation angle in the field without division is discussed.
- 【文献出处】 微细加工技术 ,Microfabrication Technology , 编辑部邮箱 ,2004年02期
- 【分类号】TP332
- 【下载频次】59