【摘要】 用水解加热法制得的纳米ZnO粉末 ,并将ZnO粉末用电泳法淀积在二氧化硅玻璃衬底上 ,综合地研究了当衬底温度发生变化时ZnO薄膜的电学光学特性的变化规律 .x射线图片显示ZnO薄膜在自然状态下是纤锌矿结构 ,薄膜在衬底温度 6 6 3K时有最小的电阻率 6 9× 10 - 2 Ωcm和 83%的高透过率 .更多还原

【Abstract】 In this investigation, zinc oxide powder has been prepared by hydrolysis pyrogenation method and deposited on SiO 2 glass by electrophoresis method. A systematic study has been made on the structure and electrical and optical properties of ZnO films as functions of substrate temperature. The X-ray diffraction studies revealed that the films were polycrystalline with a wurzite structure. Films with a minimum resistivity of 6.9×10 -2Ωcm and high transparency of 83% have been achieved at a substrate temperature of 663K.更多还原