【摘要】 采用光线追踪和光路函数的方法 ,优化设计了具有超环面镜的前置光学系统的掠入射软x射线平场谱仪 ,得到了谱仪的谱分辨和空间分辨本领 .波前像差理论和光线追踪程序得到结果均表明 ,优化设计后的软x射线平场谱仪系统在波长为 4— 4 5nm的光谱范围内具有很好谱分辨能力 (λ Δλ >10 0 0 )和空间分辨能力 (优于 4 0 μm) .更多还原

【Abstract】 Using ray tracing code and optical path function, optimization calculation is carried out on a grazing incidence soft x ray flat field spectrometer with toroidal mirror as prepositive optic system. We calculate the spectral and spatial resolution of the spectrometer system. The wave front aberration theory and ray tracing code indicate that the system has good spectral resolution(λ/Δλ)better than 1000 and spatial resolution better than 40μm in the spectrum range of 4—45nm.更多还原