【摘要】 在考虑基片与空气界面反射率以及基片吸收不能忽略的情况下 ,对常见的基片上薄膜的光强透过率公式进行了修正 ,导出了该情况下的透过率公式 .以非晶硅薄膜为研究对象 ,采用模拟计算说明基片光学特性对薄膜光强透过谱的影响 .更多还原

【Abstract】 Taking account of the reflectivity on air/substrate interface and the absorption in substrate, the common used formula to calculate optical transmission is calibrated. Taking a Si:H film as an example, the effect of above factors on spectra is investigated from simulated results.更多还原