【摘要】 综述了制备钛酸钡系薄膜的各种方法,如:溶胶—凝胶法、有机金属化学气相沉积法、射频磁控溅射法、脉冲激光沉积法等,其中主要对溶胶—凝胶法和射频磁控溅射法的制备原理及工艺特点进行了讨论。介绍了钛酸钡薄膜的性质和掺杂后(主要是锶掺杂)对薄膜电性能的影响,对它们的应用现状进行了概括,并对钛酸钡系薄膜的发展趋势做了展望。更多还原

【Abstract】 The preparation methods of BaTiO₃-based thin film such as Sol-Gel method,metallorganic chemical vapor deposition（MOCVD）method,radio-frequency magnetron sputtering method and pulsed laser deposition method have been summarized.The preparation mechanism and process feature of Sol-Gel and radio-frequency magnetron sputtering methods are mainly discussed.The properties of BaTiO₃ thin film and the influence of doping（Sr-doped） on the electric performance are also introduced.The current status of application and the development trend of BaTiO₃-based thin film are presented.更多还原