【摘要】 针对RCE光电探测器存在的问题提出两种解决方案。将InP/空气隙的分布布拉格反射镜(DBR)结构引入RCE光探测器,只用1.5对InP/空气隙计算反射率约为95％,解决了长波长反射镜制备问题。所制备的器件,在波长1.585μm处获得了约54.5％的峰值量子效率,以及8GHz的3dB响应带宽。另一种引入斜镜结构解除了量子效率与超窄光谱响应线宽的相互制约。更多还原

【Abstract】 In this paper two structures had been proposed to resolve two problems of the resonant cavity enhanced photodetectors(RCEPD). Long wavelength RCE photodetectors with InP/air gap DBR was realized .The quantum efficiency of 54.5% at 1.585μm and 3dB bandwidth of 8GHz have been achieved. Another technique using the inclined-mirror structure makes the filtering and the absorption functions decoupled, thus narrow spectral response linewidth and high quantum efficiency can be achieved simultaneously.更多还原