【摘要】 以工业乙腈为原料,采用干燥脱水-亚沸蒸馏-膜过滤组合工艺,制备出超净高纯乙腈,讨论了实验室洁净度、实验设备和器皿的材质、亚沸蒸馏次数、膜种类、膜孔径等因素对产品质量的影响。平行实验结果表明,在优化条件下,能够制备质量稳定的超净高纯乙腈产品,应用评价结果显示其清洗效果总体优于常规补充金属氧化物半导体级酸碱清洗液,可应用在半导体器件相应的清洗工艺中。更多还原

【Abstract】 Using commercial product acetonitrile as raw material, super-clean and high-purity acetonitrile was produced by the composite process of drying and dewatering, subboil distillation, and membrane filtration. Influences of cleanliness degree of laboratory, material of laboratory equipment and labware, number of subboil distillation, membrane type and its hole diameter etc on product quality were investigated. Under optimum conditions, parallel experimental results showed that product quality was stable. Its application demonstrated that the cleansing effect of the process was superior to washing by ordinary CMOS acid and alkali cleansing solution, which was used as cleansing solution of semiconductor.更多还原