【摘要】 超光滑表面在现代科学技术中具有重要意义。超精密抛光技术是实现超光滑表面的主要方法。本文对超光滑表面的概念、影响超精密抛光质量的因素、几种超精密抛光方法及其所能达到的抛光效果、抛光效果的测量与评价方法等进行了介绍。同时描述了超精密抛光的发展阶段、现状和发展趋势更多还原

【Abstract】 Supersmooth surfaces are of great importance to the modern science and technology. Superpolishing techniques are main ways to make supersmooth surfaces. The definition of supersmooth surfaces and the factors influencing the superpolishing quality are presented in this paper. The feature, the level achieved, the measurements and evaluation of the superpolishing techniques are introduced briefly. In addition, the past, present and future of the superpolishing techniques are detailed.更多还原