【摘要】 我们采用高分辨X射线衍射法对SiC单晶片中的多型结构进行了研究 ,研究发现在以 4H SiC为籽晶的晶体生长过程中 ,4H SiC、6H SiC、1 5R SiC出现两相共存或三相共存现象。在单相、两相或三相共存区 ,X射线摇摆曲线具有明显不同的特征。根据多型结构 ,可以对摇摆曲线中的衍射峰进行鉴定更多还原

【Abstract】 The polytype structure of SiC single crystal slice was investigated by high resolution X-ray diffractometry. We discovered that there are two or three phase existence of 4H-SiC,6H-SiC,15R-SiC in the process of the growth of 4H- SiC seed at a definite condition. At different regions the rocking curves have remarkably different features. Base on the polytype structures of SiC, the diffraction peaks can be identified in the rocking curves.更多还原