【摘要】 随着微电子机械系统 (MEMS)研究的深入和产业化的需求 ,检测技术在其中的重要性越来越大 .基于机器微视觉的MEMS动态测试系统 ,利用模糊图像合成技术对MEMS的平面微运动特性参数进行提取和分析 .利用图像处理方法对MEMS谐振器做扫频和扫压测量 ,获得了MEMS器件的平面微运动特性 ,并对测量结果进行了分析和讨论 .由实验结果可以看出 ,这种方法有较高的测量精度 ,测量重复性误差为 10 0nm .更多还原

【Abstract】 Testing technique is more and more important because of research and development of MEMS. Based on machine micro-vision dynamic testing system for MEMS, the technique of blur image synthesis is presented to exact and analyze in-plane motion characteristic of MEMS devices. Image processing method is used to carry out frequency sweep and voltage sweep measurement. The in-plane motion characteristic of MEMS is obtained and the testing results are analyzed and discussed. From experiment results it can be seen that the resolution and repeatability of the method is obtain to 100nm.更多还原