【摘要】 三维微电子学主要研究三维集成电路的设计与制造。文章讨论了三维集成电路的概念、发明思想、结构、优点、制造及其挑战和应用等。三维微电子技术必将成为未来发展的新兴技术。更多还原

【Abstract】 Three-dimensional microelectronics focuses on the design and fabrication technology for 3-D integrated circuits. The concept, ideas, structures, merits, fabrication technology, challenges and applications of 3-D integrated circuits are reviewed in the paper. 3-D microelectronics is becoming an emerging science and technology for the future.更多还原