【摘要】 利用直流磁分离及脉冲阴极双激发源等离子弧薄膜沉积装置制备了含Ti底层和无Ti底层的类金刚石碳薄膜(DLC);采用纳米硬度计、原子力显微镜和X射线光电子能谱仪分析了薄膜的力学性能和结构;采用УСК-1型球-盘滑动摩擦磨损试验机考察了薄膜的摩擦性能.结果表明,同无Ti底层的DLC薄膜相比,含Ti底层的DLC薄膜的硬度和弹性模量较低;含Ti底层的DLC薄膜经真空400℃退火后表面层中存在TiO2,内部存在TiC;而无Ti底层的DLC薄膜经真空500℃退火处理后硬度、弹性模量和表面形貌几乎保持不变;无Ti底层的DLC薄膜经空气中500℃退火后摩擦系数明显降低,这是由于DLC薄膜在空气中热处理时更易发生石墨化所致.更多还原

【Abstract】 Diamond-like carbon （DLC） films with and without Ti underlayer were prepared with complex plasma arc of DC magnetic separation and pulsed cathode. The mechanical properties, structures, and surface morphologies of the films were analyzed by means of nano-indentation, atomic force microscopy, and X-ray photoelectron spectroscopy. The friction behaviors of the films sliding against SAE-52100 steel under ambient dry conditions were investigated on a УСК-1 friction and wear tester in ball-on-disc configuration. It was found that the DLC films with Ti underlayer had lower hardness and elastic modulus than those without Ti underlayer. The annealing of the DLC film without the underlayer in vacuum up to 500 ℃ led to little change in the mechanical properties and morphologies. However, the DLC film without the Ti underlayer annealed at 500 ℃ in air showed a greatly decreased friction coefficient, which was attributed to the easier graphitization of the film in air. Moreover, TiO₂ and TiC were detected in the DLC film with the Ti underlayer annealed at 400 ℃ in vacuum, which was attributed to the competitive oxidation and carburization of Ti.更多还原