【摘要】 利用在线参数估计和自校正控制算法设计一个自校正控制器,以解决纳米工作台因各参数变化而其精确的数学模型难以确定,因而影响定位精度的问题。Matlab仿真结果表明该算法能够克服由扰动引起的系统参数变化对系统精度的影响,其控制性能优良更多还原

【Abstract】 Owing to the changes of the system parameters,it’s difficult to determine the mathematical model of the nanometer positioning worktable,which thus influences the precision of the positioning.In order to solve such problem,a selfturning controller is designed based on the theory of online parameter estimation and selfturning algorithm.the Matlab emulation outcomes indicate that this method can bear,with efficient control capacity,the changes of the system parameters resulting from disturbances which will influence the precision of positioning.更多还原