【摘要】 提出一种新型压电驱动单级电液伺服阀,其特点是可以提供比传统电磁式电液伺服阀更高的频宽与分辨率,而且结构紧凑、抗污染能力强。该阀采用大行程的压电叠堆(积层式压电驱动器)作为驱动元件直接驱动滑阀,通过基于弹性变形原理的弹性板机构,结合电阻应变式微位移传感器,实现机构及检测一体化。应用有限元法对弹性板机构进行分析优化,试制了直动式压电伺服阀样机并对样机进行了试验研究,得出该阀的频宽约为1kHz。新型伺服阀可以应用于振动试验台、疲劳试验台及需要快速反应的流体控制系统中,提高系统的响应特性。更多还原

【Abstract】 A single-stage servo valve using direct piezoelectric actuator drive is proposed. It takes advantages of the higher bandwidth and resolution. The structure of the valve is compact and the antipollution capability is perfect. The large stroke multilayer piezoelectric actuator is served as the drive element that drives the power-stage spool directly. Bidirectional control of the spool is realized by the spring plate mechanism and single multilayer piezoelectric actuator. The displacement of the spool is measured by strain gauge which is bonded to the spring plate mechanism. The spring plate is analyzed by finite element method. Piezoelectric direct drive servo valve prototype is trial-manufactured and tested. The results show mat the bandwidth is up to 1 kHz. The new servo valve can be applied to many high response occasions such as high frequency vibration experimental bed, durability test bed. It will enhance the response characteristic of these systems.更多还原