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压电石英晶片扭转效应理论研究与验证

THEORETICAL RESEARCH ON THE TORSIONAL EFFECT OF PIEZOELECTRIC QUART WAFER AND EXPERIMENTAL VALIDATION

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【作者】 高长银孙宝元

【Author】 Gao Changyin Sun Baoyuan (Key Laboratory for Precision & Non-traditional Machining of Ministry of Education, Dalian University of Technology, Dalian 116024)

【机构】 大连理工大学精密与特种加工教育部重点实验室大连理工大学精密与特种加工教育部重点实验室 大连 116024大连 116024

【摘要】 从各向异性弹性理论和麦克斯韦电磁理论出发,较系统地探讨了圆形压电石英晶片扭转效应理论,得出了扭转应力场与非线性极化电场分布规律,并采用有限元法求得了极化电荷电场在压电片内的分布。根据理论分析,用分割电极法有效地在压电片表面布置了检测电极,理论与试验结果均表明电极检测的极化电荷量与外转矩成线性关系,理论与试验基本符合。这些研究为新型转矩传感器与测力仪的开发奠定了必要的理论基础。

【Abstract】 The torsional effect of piezoelectric quartz wafer is first investigated. The torsional theory of circular quartz is deduced by using the anisotropic elasticity and Maxwell electromagnetic theory, then the stress field and electrostatic field is founded. The distribution of the electric field in the piezoelectric body is obtained by the finite element method. Based on theoretical analysis of the bound charge distribution, the measuring electrodes are effectively disposed on the surfaces of the piezoelectric body. As the result, the polar charge is linear with the torque. A satisfactory agreement is obtained between the computed results and experimental results. The analysis provides the basis for the torque measuring technique on the single circular piezoelectric quartz.

【基金】 高等学校博士学科点专项科研基金资助项目(980140106,20010141006)。
  • 【文献出处】 机械工程学报 ,Chinese Journal of Mechanical Engineering , 编辑部邮箱 ,2004年08期
  • 【分类号】TN304
  • 【被引频次】13
  • 【下载频次】167
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