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自动椭偏测厚仪测量精确度的实验研究
Experimental Study on the Measuring Repeatability and Accuracy of an Automatic Ellipsometer
【摘要】 根据椭偏消光法和光度法原理,研制成功一台消光法和光度法兼容的自动椭偏测厚仪。本文介绍椭偏光度法的测量原理和仪器的测量过程及方法,并详细给出仪器测量精确度的实验研究结果。
【Abstract】 Based on the principle of null and photometric ellipsometry,an automatic ellipsometer has been developed.The paper introduces the principle of photometric ellipsometry and the working process and method of the ellipsometer.The results of expeimental study on the repeatability and accuracy of the ellipsometer have been gived in detail.
【关键词】 椭偏仪;
消光法;
光度法;
膜厚;
精确度;
【Key words】 Ellipsometer; Null method; Photometric method; Film thickness; Repeatability and accuracy;
【Key words】 Ellipsometer; Null method; Photometric method; Film thickness; Repeatability and accuracy;
【基金】 广东省工业攻关基金资助项目(C60109)
- 【文献出处】 机电工程技术 ,Machine Development , 编辑部邮箱 ,2004年04期
- 【分类号】TH821
- 【被引频次】6
- 【下载频次】332