【摘要】 本文介绍了碳系列薄膜、纳米多层及纳米复合超硬薄膜近年来所取得的研究成果 ,重点是氮化物纳米多层与复合超硬薄膜的研究状况 ,并对纳米多层膜在应用中存在的问题提出了解决的思路 ,指出了超硬薄膜的发展趋势更多还原

【Abstract】 The current achievements in superhard films were reviewed including diamond,diamond-like,c-BN,B-C-N,nano-multilayer and nano-composite films in the past several years.Specially,nano-multilayer and nano-composite films of nitride were introduced in detail.The problems of nano-multilayer films existed in practical applications were presented and the methods of solution were suggested.The perspective on the development of superhard films was given.更多还原