【摘要】 利用压电晶体的逆压电效应 ,设计并制作了一种纳米精度步进马达 .将实际结构简化为理论模型 ,从理论上对马达的动态特性进行分析 ,获得了纳米马达步进运动的一些参数判据 ,并对马达的步进运动特征进行了软件模拟更多还原

【Abstract】 Based on the converse piezoelectric effect of piezoelectric crystal, a nanometer precision stepper motor is designed and fabricated. The real structure is simplified into a theoretical model, and the dynamic characteristics of the motor are theoretically analyzed. Some parameter criterions of the motor are obtained, and the movement characteristics of the motor are simulated with software.更多还原