【摘要】 量块的测量是长度计量的重要基础。文中的装置采用了高精度的633nm碘稳频氦氖激光器和543nm热稳频氦氖激光器各一台,分别将不同波长的激光光束入射到典型的迈克尔逊干涉仪中,使放置在测量光路中的量块与平晶研合在一起的组合体和参考镜进行干涉,利用CCD摄像机获取干涉图像,同时测量量块温度及空气折射率(或环境参数),一同输入计算机中进行处理计算得到测量结果。对于125～1000mm量块的测量难点是保证温度要稳定、均匀、偏离20℃的范围要小。为此,设计了可高精度控温的仪器箱,可调节温度到17～23℃,温度变化率小于0.01℃ h,从而实现量块线膨胀系数的测量。该装置的量块长度测量不确定度达到U99=0.02μm+0.2×10-6L,量块线膨胀系数测量的不确定度可达U99=0.2×10-6℃-1。更多还原

【Abstract】 Gauge block is one of the most important tools in length metrology. A new interferometer using one iodine-stabilized 633 nm He-Ne laser and one heat-stabilized 543 nm He-Ne laser was developed. The measuring results are obtained by means of exact fraction method. It is very important in measurement to control the temperature in high stability and measure it accurately. The uncertainty of gauge block measurement is U₉₉=0.02μm+0.2×10^-6 L. The uncertainty of expansion coefficient of gauge block measurement is U₉₉=0.2×10^-6℃^-1.更多还原