【摘要】 光学共焦显微镜现己广泛地应用于微机械、生物样品、材料及微电子器件的三维测量,但经典的光学共焦显微镜由于原理性限制,其分辨率与精确度远低于接触式传感器。现结合双频激光干涉仪和共焦显微镜的优点,使激光干涉共焦显微镜不仅横向分辨率高,而且使纵向分辨率达到0.1nm,扩展不确定度U95=13.4nm,使之能测量纳米量级形位变化,而且测量值直接溯源至激光波长。更多还原

【Abstract】 Optical confocal microscopies are very interesting used in many fields: such as non-contact 3D measurement for fabricated materials, biological specimens, geological samples, machined parts, integrated circuit surface profile informations. However, since the restricting of depth response, the depth accuracy and resolvability of the classic confocal microscope are lower than that of contact sensor. Here it is by use of laser heterodyne interference technology to improve the confocal microscope’s accuracy and resolution. The resolvability is within reached 0.1 nm and the uncertainty (U₉₅) is 13.4 nm in Z direction and the measuring length can be traced directly to wave length of the laser.更多还原