【摘要】 提出了一种新的实时微振动激光干涉测量仪。通过采用复合光源和反馈系统 ,有效地消除了激光二极管 正弦相位调制 (LD SPM )干涉仪中由电流调制所带来的测量误差和外界干扰所带来的影响 ,实现了物体微振动的纳米精度实时测量更多还原

【Abstract】 A novel LD-SPM interferometer, which can be used to measure micro-vibrations with a high accuracy in real time, is proposed. In this paper, a composite light source is employed to decrease the measurement errors caused by the light-intensity changes. Experiments verify the usefulness of the interferometer.更多还原