【摘要】 围绕研制大口径高精度光学玻璃材料光学均匀性测量仪 ,简要介绍一种光学玻璃光学均匀性的绝对测量原理及其优点 ,介绍了系统组成、数据处理方法与流程 ,给出了与Zygo干涉仪的对比测量结果 ,结果表明其对大于 3 0mm厚光学玻璃材料的光学均匀性检测精度可达 1×10 - 6 。更多还原

【Abstract】 One method of testing the homogeneity of optical glass and it’s advantage are described;Using this method,a high accuracy apparatus is developed,the apparatus’s system composition and data processing method are introduced.Two testing results of the same one sample using Zygo interferometer and using our apparatus are given.The experiment shows our apparatus’s measuring error is less than 1×10 -6 .更多还原