【摘要】 为了寻找制备梯度金属薄膜的新方法和新工艺 ,采用脉冲准分子激光扫描沉积技术 ,在Si(10 0 )单晶衬底上沉积了Al/Ag掺杂功能梯度薄膜 ,并采用SEM和XPS对制备的薄膜进行了微观分析。分析结果表明 ,运用合适的激光参数和辅助放电 ,在沉积温度 30 0℃时 ,制备出了Al/Ag组分比近似为 5∶1的掺杂梯度薄膜。该实验方法说明 ,利用脉冲激光与金属掺杂靶相互作用沉积梯度金属薄膜是可行的。更多还原

【Abstract】 Metal gradient thin films have many excellent properties and a wide use.The aim of our research is to find new method and new techniques of preparing metal gradient thin films.Al/Ag doping functional gradient thin films have been successful synthesized on Si (100) substrate by using scanning pulsed excimer laser ablation technique.The structure of Al/Ag thin films deposited by pulsed laser deposition(PLD) is analyzed by scanning electron microscope(SEM),X-ray photoelectron spectroscopy(XPS).The experimental results illustrate that applying appropriate laser parameter and assistant discharge can synthesize the Al/Ag thin films with approximate ratio 5∶1 at the 300℃.This experimental method indicates that it is feasible to deposit functional gradient metal thin films by means of the interaction between pulsed laser and metal doping target.更多还原