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管腐蚀法制作纳米光纤探针

Fabrication of nanometric optical fiber probe by tube etching method

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【作者】 王慧任宏亮何金田林土胜梁二军郭茂田王世明沈书泊

【Author】 WANG Hui 1,3,REN Hong-liang 2,HE Jin-tian 2,LIN Tu-sheng 1,LIANG Er-jun 2,GUO Mao-tian 2,WANG Shi-ming 2,SHEN Shu-bo 2 (1.Institute of Electronic & Information Engineering ,South China University of Technology,Guangzhou 510640,China; 2. Institute of Physical Engineering,Zhengzhou University,Zhengzhou 450052,China; 3. Institute of Science,Zhanjiang Ocean University,Zhanjiang 524025,China)

【机构】 华南理工大学电信学院郑州大学物理工程学院郑州大学物理工程学院 广州510640湛江海洋大学理学院湛江524025郑州450052广州510640郑州450052

【摘要】 根据优质探针的理论模型 ,利用管腐蚀法制作了可用于光纤生物传感器的纳米光纤探针 ,该制作方法操作方便 ,成本低廉 ,易于批量生产 ,且受环境的影响较小 ,制作的光纤探针具有较高的重复率。所获探针锥径小于 5 0nm ,锥角为 4 5°。最后讨论了在管腐蚀实验中不良因素对光纤探针形貌的影响

【Abstract】 According to a theoretical model of making high quality probe,we make the nanometric optical fiber probe that can be utilized in optical fiber biological sensor with tube etching method.This method is easy to manipulate and produce with relatively low cost.Moreover,it is not so sensitive with the experimental environment,so the repeative rate of making optical fiber probe is relatively high.The tips diameters are less than 50nm,and the taper angle 45°.We finally analyze and discuss the shape of optical fiber probe under the effect of some uncertain factors during the tube etching experiment.

【基金】 河南省高校创新人才基金资助项目 (1999 12 5 )
  • 【分类号】TN253
  • 【被引频次】20
  • 【下载频次】287
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