【摘要】 为了最大程度地改善CCD图像传感器的填充因子 ,进行了用于与CCD集成的微透镜阵列的光学优化设计 ,并与实验结果进行了对比。测试结果表明 ,所设计的透镜阵列使CCD的填充因子提高 2 .9倍 ,相对光谱响应增加了 0 .2。所设计的透镜对于改善CCD入射信号光的光强分布、提高光利用效率 ,从而提高CCD的光电性能有显著效果更多还原

【Abstract】 To increase the fill factor of CCD image sensor greatly,the structure of microlens array matched with the CCD is designed and compared with the experimental results.The results show that the microlens integrated with CCD can improve the fill factor of visible CCD by a factor of 2.9 and the relative spectrum response has an increase of 0.2.The design indicates that the microlens array can optimize the intensity contribution and improve the fill factor and the photoelectricity performances of CCD sensors remarkably.更多还原