【摘要】 基于微机电系统 (MEMS)技术研制的微型继电器具有体积小、功耗低、开关迅速、稳定性高等优势 ,将有效弥补传统电磁继电器和固态继电器之间的不足。以一种微机械电磁继电器为例 ,介绍了应用MEMS技术的微型电磁继电器的结构特点和工作原理 ,并分析了影响其动作性能指标的关键参数 ,最后介绍了MEMS加工制作工艺特点及今后的研究方向更多还原

【Abstract】 With the advantage of small volume, low power consumption, quickly switch, and high stability, the micro electromagnetic relays based on MEMS technology will cover the shortage between traditional electromagnetic relay and solid state relay. The design feature and operation principle of micro electromagnetic relay was illustrated by a micromechanical electromagnetic relay in this paper, and some key parameters influence movement performance was analyzed. In the end, fabrication features of MEMS and future research direction was stated.更多还原