【摘要】 本文建立了单平行四杆柔性铰链机构的输出位移和耦合误差的公式 ,并用有限元法分析其主要参数对输出位移和耦合误差的不同影响 ,指出耦合误差的存在对纳米级工作台的定位精度和分辨率有较大的影响。更多还原

【Abstract】 The formulas of the output displacement and coupling error of single parallel four-bar flexure hinge mechanism was established.The different influence on the output displacement and coupling error of the main parameters of the mechanism was analyzed with finite element method. A conclusion that the coupling error had impacted on the positioning accuracy and resolution of the nanometer stage was obtained.更多还原