【摘要】 基于MEMS技术设计的集成温湿度传感器具有重量轻、体积小、成本低、易集成等特点 ,并可大大提高器件的一致性、可靠性 ,易形成批生产能力。本文首先从理论上分析了利用热电原理测量空气绝对湿度的可行性 ,然后利用有限元分析方法对湿度传感器进行了结构建模 ,并模拟铂电阻的升温与空气湿度的变化关系曲线。在此分析基础之上 ,得出测量绝对湿度的方法。更多还原

【Abstract】 Integrated temperature and humidity sensor based on MEMS has the advantages of light weight,small size,low cost,easily integrated,highly advanced identity of apparatus,reliability,and easy production.The feasibility of thermoelectricity conductivity method used to measure absolute humidity is analyzed.The structured modeling of humidity sensor utilized finite element analysis was presented,and variational curve of temperature of Pt resistance and humidity was simulated.Based on this analysis,the method to measure absolute humidity was obtained.更多还原