【摘要】 首次以ZnS为源 ,采用化学气相沉积法在抛光的Si单晶片衬底上生长晶态的ZnO纳米颗粒 ,其形貌、尺寸和密度都与气体流量、衬底温度、生长时间以及有无催化剂等生长条件密切相关 .在没有Au催化的条件下 ,ZnO颗粒呈圆形颗粒 ,直径多在 30 2 0 0nm之间 ,密度为 10 4— 10 9cm-2 ;有Au催化的条件下 ,ZnO纳米颗粒呈六边形 ,平均尺寸明显变小 ,在 10 10 0cm之间 ,而密度显著提高 ,为 10 8— 10 10 cm-2 .所制备的纳米ZnO颗粒在 4 97nm和 376nm附近分别有很强和较弱的光致发光更多还原

【Abstract】 Crystalline ZnO nano-particles were synthesized on Si substrate with and without Au catalyst through chemical vapor deposition(CVD) method with ZnS as the source material for the first time. The growth morphology of ZnO particles is strongly affected by the flow rate, the temperature of the Si substrate and the catalyst. Without Au catalyst, the nano-particles are round in shape with the average sizes in the range of 30-200nm and the density of 10 4-10 9cm -2. In the presence of Au catalyst, ZnO particles grow into hexagonal shape. The average particle sizes are smaller, in the range of 10-100nm, while the particle density becomes larger, in the order of 10 8-10 10cm -2, than those of the ZnO particles grown without Au. Strong and relatively weak photoluminescence peaks around 497nm and 376nm are found for the as-synthesized ZnO nano-particles.更多还原