【摘要】 简要介绍了光刻在 1 2 8× 1 2 8混合式非制冷热释电焦平面 (UFPA)探测器制作中的重要地位 ,重点介绍了光刻在铟柱制备中的应用研究。对铟柱成形的几种方法进行了比较 ,确定了剥离法制备铟柱。并进行了光刻实验与分析 ,得到了满足 1 2 8× 1 2 8混合式非制冷热释电焦平面器件倒装互连的铟柱更多还原

【Abstract】 The paper introduces the important role of photolithography in the study of 128×128pixels uncooled focal plane arrays(UFPA). And photolithography plays a vital part in indum bump fabrication. Compared with the matter of indum bump fabricated, we are convicted peel off is actual. With the analysis of the experiment ,we get the excellent indum bump.更多还原