【摘要】 根据热释电薄膜红外探测器的结构和测试条件 ,使用有限元软件Ansys对其进行了二维热分析 ,得到了探测器受到红外辐射后的温度场。分析了复合热释电薄膜红外探测器的绝热层对温度场的影响 ,并将它与微桥结构探测器的性能进行了比较。结果表明 ,复合热释电薄膜红外探测器的绝热层能有效地减小热流向硅衬底的散失 ,并且探测器的响应随着绝热层厚度的增大而增大 ;当复合热释电薄膜红外探测器中绝热层的热导率低于空气的热导率时 ,它的绝热性能优于微桥结构。更多还原

【Abstract】 Two dimensional thermal analysis of multi layer pyroelectric thin film infrared detector is carried out according to the structure and test conditions of detector and its temperature distribution is obtained. The influence of thermal insulation layer on temperature distribution is analyzed compared with that of micro bridge structure. Results show that the insulation layer of multi layer pyroelectric thin film infrared detector can effectively reduce thermal flow from pyroelectric layer to substrate and the response of detector increases with the increasing of the thickness of insulation layer. When the thermal conductivity of insulation layer is lower than that of air, its performance is better than that of micro bridge structure.更多还原