【摘要】 介绍了硅各向异性腐蚀的含义、特点、用途以及常用的腐蚀剂等基本要素 ;着重论述了试图解释硅各向异性腐蚀行为的几种典型机理 ,并在此基础上对各腐蚀机理做了简要分析更多还原

【Abstract】 The meanings,characteristics,purposes of the anisotropic etching of silcon and frequently used etchants etc.are introduced. And especially the explanations of anisotropic etching mechanisms of crystal silicon are emphasized on. Then a survey of the analysis on the etching mechanisms refered is made.更多还原