【摘要】 首先对微机械(MEMS)的分类及其特点作了简明的阐述,在此基础上,着重评介了近年来该领域各种微细加工方法及其能够达到的加工尺度与水平。指出当前微细加工技术仍然在以使用物理和化学能量的特种加工为主,并呈现加工材料扩大化、产品机构复杂和加工手段复合化的发展态势。更多还原

【Abstract】 Based on the general grasp of the classification and charicteristic of MEMS, this paper summarizes vari-ous micro and precision processes in this field and its dimensional limitation and capacity. Some photos are selecct-ed to show related micro-tools and machining equipment. Finally, the paper concluded that the nontraditionalprocesses, which use physical and chemical energy,are still playing a main role in MEMS, at the same time threetendencies are emerging. These three tendencies are as follow: (1) Materials to be machined are being broadened;(2) The products and parts of MEMS are becoming more complicated; and (3) Different manufacturing processesare mixing together.更多还原